Magnetic micropositioner and method of providing the same

ABSTRACT

A micropositioner is provided, which contains an outer magnetic pole-piece and an inner magnetic pole-piece located within the outer magnetic pole piece. At least one permanent magnet is located between the inner magnetic pole piece and the outer magnetic pole-piece. At least one coil is located between the inner magnetic pole-piece and the outer magnetic pole-piece, wherein the at least one coil is capable of directing magnetic flux between the inner magnetic pole-piece and the outer magnetic pole-piece. An outer movable shell is also movably connected to the outer magnetic pole-piece.

CROSS-REFERENCE TO RELATED APPLICATION

The present application is a continuation-in-part of U.S. patent application Ser. No. 10/858,482, filed on Jun. 1, 2004, now U.S. Pat. No. 7,437,980 which is a continuation-in-part of U.S. patent application Ser. No. 10/448,336, filed May 29, 2003, now U.S. Pat. No. 7,275,468 which claims the benefit of U.S. Provisional Application No. 60/383,956, filed on May 29, 2002. The entire contents of the above applications are incorporated herein by reference.

FIELD OF THE INVENTION

The present invention is generally related to micropositioners, and more particularly is related to a micropositioner having multiple degrees of freedom.

BACKGROUND OF THE INVENTION

A fast tool servo is a well-known device that can be added to a new or existing machine tool to provide an additional axis of motion between the cutting tool and a workpiece. A fast tool servo most notably distinguishes itself by its ability to move the tool at a much higher bandwidth, that is at a high speed of controlled, repetitive motion, on its axis relative to the other machine tool axes, with accuracy equal to or better than that of the other tool axes. Fast tool servos fall into two broad categories: rotary and linear. A rotary fast tool servo produces relative motion between the cutting tool and a workpiece by rotation of a swing arm that carries the tool at a fixed radius from the axis of rotation. A linear fast tool servo produces relative motion between the cutting tool and a workpiece by producing a linear translation of the tool.

A rotary fast tool servo is preferred in certain precision machining applications that are intolerant to the reaction force developed by a linear fast tool servo. For instance, in an application where it is desired to produce a textured surface on a spherical-shaped workpiece a fast tool servo is mounted on a rotary table that allows the tool to engage the workpiece, which is mounted to a spindle, at all points from its “pole” to its “equator”. A rotary-type mechanism oriented with its rotation axis parallel to the rotary table generates a reaction torque on the rotary table, which can be allowed to float as a reaction mass or be locked and allowed to transmit the torque to the machine structure. In the later case the machine structure experiences a disturbance torque whose value does not depend on the angle of the rotary table. In contrast, a linear fast tool servo generates a reaction force on the rotary table. This is generally not a problem when the rotary table is positioned so that the reaction force is parallel to the direction of travel of the slide carrying the rotary table. However, when the rotary table is positioned so that a component of the reaction force is perpendicular to the direction of travel of that slide, that force component is transmitted by the slide to the machine structure as a disturbance. To the extent that the tool/workpiece interaction is affected by disturbances to the machine structure, a linear fast tool servo will produce errors in the desired surface texture as a function of “latitude” on a spherical workpiece.

Current fast tool servo technology does not support sufficient bandwidth to meet certain manufacturing goals and is also not sufficiently fast to machine certain types of materials, for example, some plastics, properly. It is desirable to have a method and apparatus for a rotary fast tool servo having a higher bandwidth than currently available systems.

Thus, a heretofore unaddressed need exists in the industry to address the aforementioned deficiencies and inadequacies.

SUMMARY OF THE INVENTION

Embodiments of the present invention provide a micropositioner. The micropositioner contains an outer magnetic pole-piece and an inner magnetic pole-piece located within the outer magnetic pole piece. At least one permanent magnet is located between the inner magnetic pole piece and the outer magnetic pole-piece. At least one coil is located between the inner magnetic pole-piece and the outer magnetic pole-piece, wherein the at least one coil is capable of directing magnetic flux between the inner magnetic pole-piece and the outer magnetic pole-piece. An outer movable shell is also movably connected to the outer magnetic pole-piece.

Other systems, methods, features, and advantages of the present invention will be or become apparent to one with skill in the art upon examination of the following drawings and detailed description. It is intended that all such additional systems, methods, features, and advantages be included within this description, be within the scope of the present invention, and be protected by the accompanying claims.

BRIEF DESCRIPTION OF THE DRAWINGS

Many aspects of the invention can be better understood with reference to the following drawings. The components in the drawings are not necessarily to scale, emphasis instead being placed upon clearly illustrating the principles of the present invention. Moreover, in the drawings, like reference numerals designate corresponding parts throughout the several views.

FIG. 1 is an isometric projection of the rotary fast tool servo assembly in accordance with a preferred embodiment of the present invention.

FIG. 2A is an isometric projection of a cutting tool according to principles of the preferred embodiments of the present invention.

FIG. 2B is a top view of the cutting tool of FIG. 2A in accordance with a preferred embodiment of the present invention.

FIG. 2C illustrates an enlargement of the cutting tool cutting edge in accordance with a preferred embodiment of the present invention.

FIG. 3 is an isometric projection of an alternative embodiment of the cutting tool of FIG. 2A.

FIG. 4 is a side view sketch of a swing arm assembly of FIG. 1.

FIG. 5 is a front view sketch of the swing arm assembly of FIG. 4.

FIG. 6 is an isometric projection of a tool clamp flexure of the swing arm assembly of FIG. 4.

FIG. 7 is a side cross-sectional view of the swing arm assembly of FIG. 4.

FIG. 8 is an isometric projection of a pair of flexures of the swing arm assembly of FIG. 4.

FIG. 9 is an isometric projection of the swing arm assembly of FIG. 4 illustrating two pairs of flexures of FIG. 8 and a workpiece in accordance with a preferred embodiment of the present invention.

FIG. 10 is an isometric projection of the swing arm base of FIG. 1.

FIG. 11 is an isometric projection of the swing arm assembly of FIG. 4 with two pairs of flexures of FIG. 8, a workpiece, and chip shields in accordance with a preferred embodiment of the present invention.

FIG. 12 is a perspective view of the upper chip shield of FIG. 11.

FIG. 13 is a perspective view of the lower chip shield of FIG. 11.

FIG. 14 is a perspective view of the swing arm assembly of FIG. 4 with hard stops.

FIG. 15 is a perspective view of a differential screw assembly in accordance with a preferred embodiment of the present invention.

FIG. 16A is a top view of the differential screw assembly of FIG. 15.

FIG. 16B is a cross-sectional view of the differential screw assembly taken along the line 16B-16B of FIG. 16A.

FIG. 17 is a perspective view of the rotary fast tool servo assembly of FIG. 1 without the actuator.

FIG. 18 is a side view of a workpiece on a spindle of a lathe with a rotary fast tool servo of an alternative embodiment on a rotary base according to the invention.

FIG. 19 is a view of a workpiece on a spindle with a rotary fast tool servo on a rotary base in accordance with a preferred embodiment of the present invention.

FIG. 20 is a skewed view of a rotary fast tool servo with a workpiece on a workpiece holder in accordance with a preferred embodiment of the present invention.

FIG. 21 is a perspective view of a swing arm with a damper plate in accordance with a preferred embodiment of the present invention.

FIG. 22 is a sectional view of the swing arm with a cutting tool and retention mechanism in accordance with a preferred embodiment of the present invention.

FIG. 23 is a rear view of the swing arm showing the tool clamp flexure of the retention mechanism in accordance with a preferred embodiment of the present invention.

FIG. 24 is a front view of the swing arm showing a clamp mechanism for the pair of flexures in accordance with a preferred embodiment of the present invention.

FIG. 25 is a perspective view of the base of the rotary fast tool in accordance with a preferred embodiment of the present invention.

FIG. 26 is a back bottom perspective view of the swing arm with flexure blades, a tensioning device, and sensors in accordance with a preferred embodiment of the present invention.

FIG. 27 is a side perspective view of the base with the swing arm in accordance with a preferred embodiment of the present invention.

FIG. 28 is a side perspective view of the rotary fast tool servo system showing an actuator connected to the swing arm in accordance with a preferred embodiment of the present invention.

FIG. 29 is a side perspective view of the rotary fast tool servo showing an enclosure encircling the actuator and a side stiffener on the base in accordance with a preferred embodiment of the present invention.

FIG. 30 is a front view of an exemplary workpiece in accordance with a preferred embodiment of the present invention.

FIG. 31 is a schematic of a control system in accordance with a preferred embodiment of the present invention.

FIG. 32A is a perspective view of a lathe with a workpiece and an auxiliary rotary table without the fast tool servo in accordance with a preferred embodiment of the present invention.

FIGS. 32B and 32C are views illustrating a lathe with a workpiece and a rotary tool servo system in accordance with a preferred embodiment of the present invention.

FIGS. 33A and 33B are schematic diagrams of a variable reluctance actuator and swing arm assembly in accordance with a preferred embodiment of the present invention.

FIG. 34 illustrates an embodiment of a variable reluctance actuator.

FIGS. 35A and 35B illustrate a variable reluctance actuator for use in fast tool servo applications.

FIGS. 36A and 36B illustrate the armature and stator, respectively, of the actuator in FIGS. 35A and 35B.

FIG. 37 illustrates an embodiment of a fast tool servo having the armature and stator supported on flexures.

FIGS. 38A and 38B illustrate a permanent magnet biased actuator for producing linear motion and rotary motion, respectively.

FIGS. 39A and 39B illustrate a two coil and four coil current biased actuator, respectively, for producing linear motion and rotary motion.

FIG. 40 illustrates the relationship excess acceleration forces and reaction forces in the fast tool servo system.

FIG. 41 illustrates relative motions associated with oil damping means.

FIG. 42 illustrates an embodiment of a Hall cell.

FIG. 43 illustrates an embodiment of an actuator derived from a Hall cell.

FIGS. 44A, 44B and 44C illustrate a top view, a side view and a face view of the actuator shown in FIG. 43.

FIGS. 45A and 45B illustrate embodiments of an actuator employing bias flux to provide preload force for pressurized air or oil hydrostatic bearings.

FIGS. 46A and 46B illustrate embodiments of rotational fast tool servos having a horizontal axis of motion (FIG. 46A) or a vertical axis of rotation (FIG. 46B).

FIGS. 47A and 47B illustrate a radial configuration of flux-biased coils used in conjunction with rotational fast tool servos.

FIG. 48 illustrates an embodiment of a core having a wedge shape, which can be used in embodiments of the invention.

FIG. 49 illustrates a micropositioner in accordance with an alternative embodiment of the present invention.

FIG. 50 is a cross-sectional view of the micropositioner of FIG. 49.

FIG. 51 is a schematic diagram illustrating coil and magnetic flux paths of the micropositioner of FIG. 49.

FIG. 52 better illustrates positioning of rubber bearings within the micropositioner of FIG. 49.

FIG. 53 is a schematic diagram further illustrating positioning of rubber bearings in the micropositioner of FIG. 49, and degrees of freedom.

FIG. 54A is a cross-sectional side view of an alternative micropositioner where an outer movable shell is suspended on a series of stacked o-rings with bulging interference.

FIG. 54B is a cross-sectional side view of an alternative micropositioner where an outer movable shell is suspended on a series of stacked o-rings without bulging interference.

FIG. 55 is a schematic diagram illustrating an example of the use of metal flexures instead of rubber bearings.

FIG. 56A is a schematic diagram further illustrating a metal flexure before flexure.

FIG. 56B is a schematic diagram further illustrating a metal flexure after flexure.

FIG. 57 is a schematic diagram further illustrating the micropositioner of FIG. 49 having integral capacitive position sensing devices.

FIG. 58 is a cross-sectional side view of a micropositioner having two degrees of freedom, namely, the X-axis and the Y-axis.

FIG. 59 is a cross-sectional side view of the micropositioner of FIG. 58 slightly modified by lacking a rubber bearing sheet near a center stage.

FIG. 60 is a top view of the micropositioners of FIG. 58 and FIG. 59.

FIG. 61 is a cross-sectional side view of a micropositioner, in accordance with another alternative embodiment of the invention.

FIG. 62 is a cross-sectional side view of magnetic portions within a micropositioner, in accordance with an alternative embodiment of the invention.

FIG. 63 is a cross-sectional view of the micropositioner of FIG. 62.

FIG. 64 is a cross-sectional side view of magnetic portions within a micropositioner, in accordance with an alternative embodiment of the invention.

FIG. 65 is a cross-sectional view of the micropositioner of FIG. 64.

FIG. 66 is a schematic diagram illustrating a system having multiple micropositioners and three degrees of freedom.

FIG. 67 is a schematic diagram illustrating a second system having multiple micropositioners and three degrees of freedom.

DETAILED DESCRIPTION

Referring to the drawings in detail, a high bandwidth rotary fast tool servo system is illustrated in accordance with a preferred embodiment of the present invention designated generally as 40. In a preferred embodiment, the high bandwidth rotary fast tool servo provides tool motion in a direction nominally parallel to the surface-normal of a workpiece at the point of contact between the cutting tool and workpiece.

FIG. 1 shows the high bandwidth rotary fast tool servo 40 having a swing arm assembly 42 holding a cutting tool 44 to machine a workpiece 50. The cutting tool 44 is offset from the axis of rotation 46, as best seen in FIG. 5, of the swing arm assembly 42. The workpiece 50 is held typically by a workpiece holder 51 that attaches to a lathe spindle at surface 52. The swing arm assembly 42 is supported in a base 48 having an upper portion 60 and a lower portion 62. The upper portion 60 and lower portion 62 are connected by a flexure hinge 64. The upper portion 60 of the base 48 has a differential screw assembly 66. An actuator 68 is connected to the top of the swing arm assembly 42.

In operation, the actuator 68 rotates the swing arm assembly 42 such that the cutting tool 44 is moved into and away from the lathe-mounted, rotating workpiece 50 in a rapid and controlled manner in order to machine the workpiece. In an alternative embodiment the swing arm assembly 42 and the moving member of the actuator 68 are integrated and are one and the same and carry the cutting tool 44. The differential screw assembly 66 together with the flexure hinge 64 provide accurate cutting tool positioning in a direction nominally tangent to the surface-normal of a workpiece at the point of contact between the cutting tool and workpiece and nominally parallel to the axis of rotation of the swing arm assembly by enabling the upper portion 60 of the base 48 to be repositioned in a fine-grained manner with respect to the lower portion 62 of the base 48.

FIG. 2A shows a first embodiment of the cutting tool according to principles of the present invention. The cutting tool 44 has a threaded hole 70, a cutting edge 72, a right/left plane of symmetry 74 that divides the tool into right and left halves, a left first mating surface 76 and a left second mating surface 78, a right first mating surface 80 and a right second mating surface 82, a top surface 84, and a back surface 86. The left first and second mating surfaces 76 and 78 and the right first and second mating surfaces 80 and 82 form a taper angle 88 bisected by the right/left plane of symmetry 74. The left first and second mating surfaces 76 and 78 and the right first and second mating surfaces 80 and 82 mate with the swing arm 102 of the swing arm assembly 42 as described hereinafter with respect to FIG. 5. The threaded hole 70 is substantially parallel to and nominally centered on the plane of symmetry 74.

In one preferred embodiment, the cutting edge 72 is a diamond. Alternatives for the cutting edge 72 can be various materials including cubic boron nitride, tungsten carbide, high speed steel, and other materials used for precision machining metals, plastics, ceramics, glasses and foams.

FIG. 2B is a top view of the cutting tool 44 of FIG. 2A in accordance with a preferred embodiment of the present invention. An enlargement of the cutting edge 72 is shown in FIG. 2C. A center point 98 on the cutting edge 72 lies in the plane of symmetry 74 of the cutting tool 44 as best seen in FIG. 2C. The cutting tool edge 72 has a radius of curvature 100 that lies in a plane that is substantially perpendicular to the plane of symmetry 74 of the cutting tool 44 and nominally in the plane of the top surface 84 of the cutting tool. In alternative embodiments the plane containing the radius of curvature can form a substantial angle with the top surface 84 of the cutting tool.

FIG. 3 shows an alternative embodiment of the cutting tool of FIG. 2A. The cutting tool 90, instead of being a single piece, has a cutting portion 92 set into a holder 94. The cutting portion 92 has a cutting edge 96. The holder 94 has left and right first and second mating surfaces 76, 78, 80 and 82 to mate with the swing arm assembly 42 as seen in FIG. 4. The holder 94 also has the threaded hole 70 substantially parallel to and nominally centered on the plane of symmetry 74.

In an alternative embodiment of the cutting tool, the cutting portion 92 is bonded directly to the swing arm 102 shown in FIG. 4, without the use of a holder 94. Bonding methods include, but are not limited to, epoxying, braising, soldering and diffusion bonding.

FIG. 4 is a left side view of the swing arm assembly 42 illustrated in FIG. 1. The swing arm assembly 42 has a swing arm 102, a tool clamp flexure 104, an upper pair of flexure blades 106, and a lower pair of flexure blades 108. The flexure blades are referred to herein as flexures and are pliant, extending members. The upper pair of flexures 106 and the lower pair of flexures 108 constrain the swing arm 102 in all degrees of freedom except rotation around an axis of rotation 46 that is nominally coincident with the long axis of the swing arm 102. In other preferred embodiments, the axis of rotation may be offset from but substantially parallel to the long axis of the swing arm. The swing arm 102 has an upper hub 110 and a lower hub 112. The swing arm 102 has a workpiece clearance cut 114 that is nominally midway between the upper hub 110 and the lower hub 112. The clearance cut 114 extends from a front face 116 of the swing arm 102 through the axis of rotation 46 and slightly beyond. A front/back plane 118 extends through the axis of rotation and parallel to the front face 116. The swing arm 102 has a back clearance surface 120 that is parallel to and spaced from the front/back plane 118. The clearance cut 114 allows the cutting tool edge 72 or 96 and a small portion of the cutting tool 44 or 90 to protrude from the back clearance surface 120 of the swing arm 102, and allows a workpiece to extend into the swing arm 102 as much as practicable.

In an alternative embodiment, one set of three flexures are attached to the swing arm and extend radially from the swing arm. The three flexures support the rotatable swing arm in the base and establish an axis of rotation for the swing arm. Those skilled in the art can appreciate that an embodiment of the present invention using two sets of flexures spaced apart on the swing arm so that the cutting tool is between the two sets, provides the swing arm with structural support at two opposite ends. In contrast, a single set of flexures at only one end of the swing arm provides a structural support that is less rigid. Decreasing the number of flexures from four to three also reduces the stiffness of the tool relative to the base. Preferred embodiments include a trade-off analysis to determine the number of flexures used. The trade-off in choosing three, four or more flexures and one or two sets of flexures involves considering the reduction of stiffness versus the reduction in moving mass and increase in the work space volume around the tool. To maintain a constant stiffness level at the tool, reducing the number of flexures requires increasing their dimension or choosing a material with a higher stiffness. Reducing the number of sets from two sets to one set of flexures (for example, by removing the lower flexures 108) requires the same trade-off analysis, increasing the bending stiffness of the swing arm and possibly decreasing the length of the flexures. The material of the flexures can include, without limitation, steel, beryllium-based alloys and materials that have a high fatigue strength to stiffness ratio. The material of the swing arm can include, without limitation, aluminum, steel, beryllium and composite materials that have a high stiffness to weight ratio.

The central portion of the upper flexure blade pair 106 is fixed to the swing arm 102 by bonding the flexure blades in a pair of upper slots 122 in the upper hub 110, and can be further secured by tightening a plurality of upper slot screws 124. The central portion of the lower flexure blade pair 108 is fixed to the swing arm 102 by bonding the flexure blades in a pair of lower slots 126 in the lower hub 112, and can be further secured by tightening a plurality of lower slot screws 128. A tool clamp screw 132 carried by the swing arm 102 works with the tool clamp flexure 104 to fix the cutting tool 44 or 90 in the swing arm 102.

FIG. 5 is a front view of the swing arm assembly 42 of FIG. 4 holding the cutting tool 90 of FIG. 3. The swing arm 102 has a right/left plane of symmetry 136 that contains the swing arm axis of rotation 46 and is perpendicular to the front/back plane 118, shown in FIG. 4. The swing arm 102 has a slot 138 that receives the cutting tool 90. The slot 138 has a plane of symmetry 140 that divides the slot 138 into right and left halves. The slot 138 is located in the swing arm 102 approximately midway between the upper hub 110 and the lower hub 112. The slot plane of symmetry 140 is parallel to the right/left plane of symmetry 136 and is offset from the swing arm axis of rotation 46 by a distance equal to an offset radius 142.

The cutting tool 90 is located in the swing arm 102 by mating four surfaces 76, 78, 80 and 82 on the cutting tool 90, which form a taper angle 88, to a pair of surfaces 144 and 146 in the swing arm slot 138, and mating the back surface 86 of the cutting tool 90 with a pair of back blades 148 and 150 as shown in FIG. 6 of the tool clamp flexure 104.

It can be appreciated by those skilled in the art that the holding force and alignment between a tool and a tool holder can be improved by providing the tool with a taper angle that mates with a receiving feature in a tool holder. The present embodiment improves upon this method by creating four mating areas on the tool for contact between the tool and the slot. Those skilled in the art will recognize that the discontinuity of the mating surface 76 and 78 and of the mating surface 80 and 82 by the recess in between the two portions provides four distinct areas of contact between the cutting tool 90 and the receiving surfaces 144 and 146 of the swing arm slot 138. This results in improved mating and alignment of the cutting tool 90 with the swing arm slot 138, compared to a design that utilizes simpler continuous surfaces on the cutting tool 90.

When the cutting tool 90 is held in the swing arm 102, the cutting tool plane of symmetry 74 and the swing arm slot 138 plane of symmetry 140 are coincident, and the cutting tool top surface 84 is nominally perpendicular to the swing arm axis of rotation 46. Furthermore, the center point 98 on the cutting tool edge 96 is offset from the swing arm right/left plane of symmetry 136 by a distance equal to the offset radius 142, and the center point 98 lies nominally in the swing arm front/back plane 118, as seen in FIG. 4. In alternative embodiments the center point 98 lies in front of or behind the swing arm front/back plane 118.

FIG. 6 shows the tool clamp flexure 104. The tool clamp flexure 104 has a front blade 152 that is interposed between the first back blade 148 and the second back blade 150 and is substantially perpendicular to the back blades 148 and 150. The tool clamp flexure 104 has a hole 154 for receiving a fastener 156 to secure the tool clamp flexure 104 to the swing arm back surface 158 as seen in FIG. 4. The tool clamp flexure 104 also has an access slot 160. The access slot 160 allows access to the tool clamp screw 132.

FIG. 7 is a side cross-sectional view of the swing arm assembly 42. In operation, the tool clamp flexure 104 is located on the swing arm 102 such that the cutting tool 90 is located under the front blade 152 of the tool clamp flexure 104. The tool clamp screw 132 which is accessible through the flexure slot 160, pushes on the front blade 152 of the tool clamp flexure 104 causing the front blade 152 to deflect and contact the cutting tool top surface 84, forcing the cutting tool 90 downward in the swing arm slot 138. In an alternative embodiment a screw engages the threaded hole 70 in the cutting tool 90 to draw down the cutting tool 90 into the swing arm slot 138.

When the cutting tool edge 96 and workpiece 50 contact each other during use, a cutting force 164 and a thrust force 166 develops between the two bodies. The cutting force 164 is in a direction substantially parallel to the swing arm axis of rotation 46. The thrust force 166 is in a direction substantially perpendicular to the swing arm axis of rotation 46. Both the cutting force 164 and the thrust force 166 lie substantially in the plane of symmetry 140 of the slot 138 shown in FIG. 5. The cutting force 164 and thrust force 166 are opposed by the upper pair of flexure blades 106 and the lower pair of flexure blades 108, as seen in FIG. 5. Still referring to FIG. 7, the thrust force 166, in this example, also produces a torque 168 by acting at a distance equal to the off-set radius 142 from the swing arm axis of rotation 46. The torque 168 is opposed by a torque produced by the actuator 68 as shown in FIG. 1.

FIG. 8 shows the pair of upper flexure blades 106. The lower flexure blades 108 are similarly constructed in this embodiment. Each pair of flexure blades 106 and 108 has a first flexure blade and a second flexure blade positioned substantially perpendicular to each other. Each of the blades 106 has a plurality of holes 172 and 174. The outer holes 174 are used for securing the flexure blades 106 to the swing arm base 48. The inner holes 172 allow for the upper slot screws 124 to pass from one portion of the upper hub 110 to another portion of the hub for securing the flexure blades 106 in the slots 122. The hole in the flexure blade through which the screw passes provides adequate clearance so there is no interference with the tension.

FIG. 9 shows the swing arm assembly 42 and the workpiece 50. The swing arm assembly 42 has the upper pair of flexures or flexure blades 106 in the upper hub 110 and the lower pair of flexures or flexure blades 108 in the lower hub 112. In the swing arm assembly 42, the upper and lower pairs of flexure blades or elements 106 and 108 are oriented at an angle of forty-five degrees from the swing arm right/left plane of symmetry 136, as shown in FIG. 5, so as to maximize the open space between the workpiece 50 and the swing arm base 48, as best seen in FIG. 1.

The central portion of the pair of the upper flexure blades 106 is fixed to the swing arm 102 by bonding the flexure blades 106 in the upper slots 122 in the upper hub 110, and can be further secured by tightening the upper slot screws 124. The upper slot screws 124 pass through holes 172 of the upper flexure blades 106. The central portion of the pair of the lower flexure blades 108 is fixed to the swing arm 102 by bonding the flexure blades in the lower slots 126 in the lower hub 112, and can be further secured by tightening the lower slot screws 128. Those skilled in the art will recognize that by properly tightening the screws 124 and 128, the bonded joint can be preloaded in compression to the extent necessary to avoid stress reversal in the bonded joint during use of the embodiments of the present invention. It is well known that stress reversal and tension/compression cycles, reduce the fatigue life of a mechanical component.

Rotation of the swing arm 102 relative to the base 48 causes an out-of-plane bending in the upper and lower pairs of flexure blades 106 and 108. The in-plane stiffness of each flexure blade, when combined as a system of upper and lower pairs of flexure blades 106 and 108, constrains the swing arm 102 in five of six possible degrees of freedom, leaving free rotation around the swing arm axis of rotation 46 shown in FIG. 5. That is, the upper pair of flexure blades 106 and lower pair of flexure blades 108 support and constrain the swing arm 102 as a fixed-end/fixed-end beam with a single degree of freedom of rotation around the swing arm axis of rotation 46. Those skilled in the art will recognize that the swing arm 102 is actually over-constrained by the upper and lower pairs of flexure blades 106 and 108 in the sense that the blades will resist large rotations that would require them to stretch substantially. This is acceptable in the embodiments of the present invention since the swing arm 102 is subjected to relatively small rotation angles around the swing arm axis of rotation 46. Since the cutting edge 96 is located inside of the virtual cylinder formed by joining the upper hub 110 and lower hub 112, and is spaced a small distance (i.e., the offset radius 142) from the swing arm axis of rotation 46, the bending moment on the swing arm 102 from the cutting force 164 as represented by 170 in FIG. 5, is kept within a tolerable range. In an alternate preferred embodiment, the cutting edge 96 is located outside of the virtual cylinder formed by joining the upper hub 110 and lower hub 112, and is spaced a larger distance (i.e., the offset radius 142) from the swing arm axis of rotation 46.

One skilled in the art will recognize that the swing arm 102 and flexure blades 106 and 108 can be manufactured as a single unit by machining a single piece of material using a variety of methods including wire electro-discharge machining, and will also recognize that the swing arm 102, flexure blades 106 and 108, and a portion or all of the base 48 can be manufactured as a single unit by machining a single piece of material with the above described methods.

As described hereinbefore, preferred embodiments can include as a minimum, one set of three flexures that are disposed on the swing arm and extend radially from the swing arm. The blades are disposed around the swing arm in an angular relationship as illustrated in FIG. 9 of angle α or β between the blades. The angles α and β can be optimized such that the flexures keep the center line of the rotating piece fixed. In an embodiment, the three flexures form a T-shape wherein angles α=β=90°. In another preferred embodiment, the angles α and β are non-equidistant but are optimized to increase the work space around the tool while providing the desired amount of support and stiffness at the tool to resist the cutting forces developed between the tool and the workpiece.

The swing arm base 48 is shown in FIG. 10 in accordance with a preferred embodiment of the present invention. The outer ends of the pair of the upper flexure blades 106 are fixed to the swing arm base 48 by bonding the flexure blades 106 in a plurality of base upper slots 176, and can be further secured by tightening a plurality of base upper slot screws 178. The outer ends of the pair of the lower flexure blades 108 are fixed to the swing arm base 48 by bonding the flexure blades in a plurality of base lower slots 180, and can be further secured by tightening the base lower slot screws 182. Those skilled in the art will recognize that by properly tightening the screws 178 and 182 the bonded joint can be preloaded in compression to the extent necessary to avoid stress reversal in the bonded joint during use of the invention. It is well known that stress reversal, tension/compression cycles, reduces the fatigue life of a mechanical component.

The upper and lower pairs of flexure blades 106 and 108 as seen in FIG. 9, are preloaded into tension during assembly of the flexure blade pairs with the swing arm 102 and the swing arm base 48. Those skilled in the art will recognize that the performance of the flexure blades is improved by having a certain amount of preload tension in the blades during use. The swing arm 102 and the swing arm base 48 are made of materials that have a similar coefficient of thermal expansion (CTE-1). The upper and lower pairs of flexure blades 106 and 108 are made of a material that has a higher coefficient of thermal expansion (CTE-2). In an embodiment, the swing arm 102 and swing arm base 48 are made of steel, and beryllium-copper is used for the pairs of flexure blades 106 and 108, resulting in a difference in coefficient of thermal expansion of approximately 3 parts per million per degree Fahrenheit. Initial assembly of the upper and lower pairs of flexure blades 106 and 108 with the swing arm 102 and the swing arm base 48 is performed at the ambient temperature that the fast tool servo will be used at, and is nominally room temperature. The upper and lower pairs of flexure blades 106 and 108 are bonded to the swing arm 102 and swing arm base 48 at a temperature above the ambient use temperature. The choice of temperature during the bonding process depends on the materials chosen for the swing arm 102, base 48, and the pairs of flexure blades 106 and 108, and the desired level of tension preload in the flexure blades. These parameters can be chosen to allow a bonding temperature in the range of the ambient temperature that the fast tool servo will be used to many hundreds of degrees Fahrenheit, thus accommodating bonding methods ranging from elevated temperature-cure adhesives to soldering and brazing. Because CTE-2 is greater than CTE-1, a tensile force is developed in the upper and lower pairs of flexure blades 106 and 108 when the temperature of the bonded assembly is returned to the ambient use temperature.

Still referring to FIG. 10, the flexure hinge 64 is shown between the upper portion 60 of the base 48 and the lower portion 62 of the base 48. As indicated with respect to FIG. 1, the differential screw assembly 66 has a tip 214, as shown in FIG. 1, that is carried by a block assembly 184 in the upper portion 60 and engages the lower portion 62 of the base 48. The rotation of the screw 66 is used in a method of adjusting the position of the cutting edge relative to the workpiece. Further, both the plurality of base upper slots 176 and the plurality of base lower slots 180 are located on the upper portion 60 of the base 48.

FIG. 11 shows the swing arm assembly 42 with the workpiece 50. The swing arm assembly 42 has an upper chip shield 188 and a lower chip shield 190 that protects the flexure blades 106 and 108 set in the upper hub 110 and lower hub 112 of the swing arm assembly 42 when the swing arm assembly 42 is secured to the base 48 as shown in FIG. 1. The upper chip shield 188 also shown in FIG. 12, is mounted below the upper flexure blades 106. The lower chip shield 190 also shown in FIG. 13, is mounted above the lower flexure blades 108.

The swing arm 102 has an upper skirt 192, as best shown in FIG. 9, and a lower skirt 194 to prevent debris generated during use from entering and accumulating between the swing arm 102 and the base 48 in the areas near the upper and lower pairs of flexure blades 106 and 108. The upper chip shield 188 mounts to the swing arm base 48 and engages the upper skirt 192 to form a simple labyrinth seal above the upper skirt 192. The lower chip shield 190 mounts to the swing arm base 48 and engages the lower skirt 194 to form a simple labyrinth seal below the lower skirt 194.

The upper chip shield 188 is formed of two pieces. One of the pieces is shown in FIG. 12 and has a lip 196 that forms an annular groove 198 that receives the upper skirt 192 of the swing arm 102. In addition, the upper chip shield 188 has a tapered edge 200 on the front portion to increase the clearance for the workpiece 50 and the workpiece holder 51. The upper chip shield 188 has a plurality of vertical holes 202 for receiving fasteners to secure the upper chip shield 188 to the base 48. In addition, the upper chip shield 188 has a plurality of horizontal holes 204 through which the hard stops 212 as seen in FIG. 14 extend.

The lower chip shield 190 is formed of two identical pieces. One of the pieces is shown in FIG. 13. The lower chip shield 190 has a plurality of holes 210 for receiving fasteners to secure the lower chip shield 190 to the base 48.

FIG. 14 shows the swing arm assembly 42 with four hard stops 212. The hard stops 212 are located near the swing arm 102 below the upper skirt 192 and extend outward from the swing arm 102 substantially perpendicular to the swing arm right/left plane of symmetry 136. The upper chip shield 188, as seen in FIG. 12, has a thickened cross-section to accept the hard-stops 212. A small gap 213 between an end of each hard stop 212 and the swing arm 102 allows normal rotation of the swing arm. The hard stops 212 act in pairs to limit the rotation angle of the swing arm 102 to prevent damage to the upper and lower pairs of flexure blades 106 and 108. Excessive rotation of the swing arm 102 causes closure of a pair of gaps 213 that limits rotation of the swing arm.

FIG. 15 is a perspective view of the differential screw assembly 66. The differential screw assembly 66 has a tip 214, a coarse adjustment screw 216, a fine adjustment screw 218, and a housing 219. The interface between the tip 214 and the fine adjustment screw 218 consists of a set of machined threads having a thread pitch P-1. The interface between the fine adjustment screw 218 and the housing 219 consists of a set of machined threads having a thread pitch P-2. In operation, the differential screw assembly 66 is mounted in the upper portion 60 of the swing arm base 48 with the tip 214 in contact with the lower portion 62 of the swing arm base 48.

FIG. 16A is a top view of the differential screw assembly 66. FIG. 16B is a side cross-sectional view of the differential screw assembly 66 taken along the line 16B-16B of FIG. 16A. The extension of the tip 214 of the differential screw 66 is adjusted using the coarse adjustment screw 216 and the fine adjustment screw 218. Turning the coarse adjustment screw 216 transmits rotation through pin 220 to the tip 214 while the fine adjustment screw 218 is stationary. Locking the coarse adjustment screw 216 and rotating the fine adjustment screw 218 causes motion in one direction between the coarse adjustment screw 216 and fine adjustment screw 218, and motion in the opposite direction between the fine adjustment screw 218 and the housing 219, while the pin 220 prevents rotation of the tip 214. The motion of the tip 214 relative to the housing 219 is related to the difference in the thread pitches P-1 and P-2.

FIG. 17 shows the rotary fast tool servo assembly 40 without the actuator 68. The workpiece 50 is also shown. The swing arm assembly 42 is mounted in the upper portion 60 of the base 48. The base 48 has a pair of essentially concentric circular openings 222 to receive the swing arm assembly 42. Each of the two openings 222 has the plurality of slots 176 and 180 to receive the flexure blades extending radially from the swing arm 42.

The differential screw assembly 66 is mounted in the upper portion 60 of the base 48. The upper portion 60 of the base 48 is joined to lower portion 62 of the base 48 by the flexure hinge 64. The flexure hinge 64 extends across the swing arm base from the left side of the base 48 to the right such that flexing of the flexure hinge 64 causes up/down repositioning of the cutting tool 90. By rotating the upper portion 60 of the base 48 about the flexure hinge 64, the cutting tool is adjusted vertically relative to the workpiece using the differential screw assembly 66. The lower portion 62 provides a surface 226 for the tip 214 of the differential screw assembly 66 to contact. The lower portion 62 has a mounting surface 228 for attaching the rotary fast tool servo assembly 40 to a machine tool 240, as seen in FIG. 18.

A preload spring maintains contact between the tip 214 of the differential screw assembly 66 and the surface 226 of the lower base 62. Adjustments of the coarse adjustment screw and fine adjustment screw cause the tip 214 to bear against the surface 226 of the lower base 62 causing a rotation of the upper portion 60 of the swing arm base 48 around an axis that is parallel to the long axis of the flexure hinge 64 and substantially at the center of the flexure hinge. This rotation of the upper portion 60 of the swing arm base 48 causes the cutting tool edge 96 to change elevation relative to the workpiece 50.

In a preferred embodiment of the present invention, a one degree rotation of the coarse adjustment screw 216 causes a 5 μm change in elevation of the cutting tool edge 96. An upper clamping feature 232 in the swing arm base 48 allows for enabling and disabling of the coarse adjustment screw 216. In a preferred embodiment, a one degree rotation of the fine adjustment screw 218 causes a 0.021 μm (21 nm) change in elevation of the cutting tool edge 96. A lower clamping feature 234 in the swing arm base 48 is used to hold the differential screw assembly 66 in the upper portion 60 of the swing arm base.

In the present embodiment of the rotary fast tool servo, the differential screw assembly 66 provides a ±1.27 mm of change in elevation of the cutting tool edge 96.

Alternative embodiments of differential screw assemblies are available that provide other greater or lesser changes in elevation of the cutting tool edge 96. In a preferred embodiment of the rotary fast tool servo 40, the swing arm 102 is configured to couple an actuator 68 which is mounted to the upper portion 60 of the swing arm base 48 with a thermally insulating spacer. The thermally insulating spacer, as shown in the next embodiments restricts the flow of heat from the actuator 68 into the swing arm base 48. An enclosure, as shown in the next embodiment, around the actuator 68 allows for the controlled removal of the heat generated by the actuator during use, helping to prevent the heat from entering the rest of the machine by thermal conduction, convection, and radiation.

Different methods for aligning the axis of rotation of the actuator 68 to the swing arm axis of rotation 46 are possible. One method includes precision machining of the mounting surfaces on the interface hardware between the actuator 68 and the upper portion 60 of the swing arm base 48, and precise alignment of the interface hardware to the swing arm axis of rotation 46 during assembly. Another method includes using a flexible coupling to accommodate misalignment between the actuator 68 and the swing arm 48. A flexible coupling is a well-known device used in the art for transmitting torque between two bodies while accommodating a misalignment between those bodies due to relaxed manufacturing and assembly tolerances.

Damping mechanisms, such as discussed with respect to the next embodiments, can be added between the swing arm 104 and the swing arm base 48 to improve the dynamic performance of the fast tool servo. The areas near the upper skirt 192, lower skirt 194, upper hub 110, and lower 112 are possible locations for installing damping mechanisms.

Displacement and rotation sensors, such as discussed with respect to the next embodiments, can be added between the swing arm 102 and the swing arm base 48 to provide real-time measurement data on the location and angular orientation of the swing arm relative to the swing arm base during operation of the fast tool servo. The areas near the upper skirt 192, lower skirt 194, and between the back surface 158 of the swing arm 102 and the swing arm base 48 are possible locations for installing displacement and rotation sensors. Additionally, the actuator 256 can be equipped with rotation sensors to provide real-time measurement data on the location and angular orientation of the swing arm 102 relative to the swing arm base 48.

Referring to FIG. 18, an alternative fast tool servo system 250 is shown in accordance with a preferred embodiment of the present invention. The fast tool servo 250 has a swing arm assembly 252, a base 254, and an actuator 256. The base 254 of the fast tool servo 250 is located on a rotating table 242 of the machine tool 240, such as an auxiliary spindle on a two-axis precision lathe. The rotating table 242 rotates about an axis of rotation 244, which is not coincident with the axis of rotation of the swing arm. Depending on the radius of curvature of the workpiece, the axis of rotation of the rotating table can be located inside or outside of the workpiece. For example, the workpiece shown in FIG. 18 can have the rotating table axis pass through the center of the small, spherical workpiece. To generate a surface on the workpiece that has a radius of curvature larger than the diameter of that workpiece, the axis of rotation can be located outside the workpiece. The workpiece 50 is retained by a workpiece holder 51 attached to a spindle 243 on the machine tool 240.

The base 254 has an upper portion 258 and a lower portion 260 which overlie and underlie, respectively, the predominant portion of the swing arm assembly 252. The actuator 256 is coupled to the swing arm assembly 252. The actuator 256 is mounted to the upper portion 258 of the base 254 with a plurality of thermally insulated spacers 264. The thermally insulating spacers 264 restrict the flow of heat from the actuator 256 into the base 254. In addition, the fast tool servo 250 has an enclosure 266 around the actuator 256 that allows for controlled removal of heat generated by the actuator 256 during use, helping to minimize and preferably prevent the heat from entering the rest of the fast tool servo system by thermal conduction, convection, and radiation.

Another view of the fast tool servo 250 on the rotating table 242 of the machine tool 240 is shown in FIG. 19 in accordance with a preferred embodiment of the present invention. As best seen in FIG. 20, the cutting tool 90 is shown engaging the workpiece 50. As in the previous environment, the cutting tool 90 is carried in a slot 139 (best seen in FIG. 21) in a swing arm 268 of the swing arm assembly 252. In addition similar to the previous embodiment, the fast tool servo 250 has an upper chip shield 270 and a lower chip shield 272 that protect the flexure blades from being interfered with by chips or debris coming off of the workpiece 50 during the machining process.

The motion of the swing arm 268 of the swing arm assembly 252 is measured by a pair of sensors 280. The motion of the swing arm 268 is limited by a plurality of hard stops 278 as described hereinbefore. The sensors 280 are shown behind the swing arm 252, and can be better seen in FIG. 20.

FIG. 20 is a view of the fast tool servo 250 without showing the rotating table 242 of the machine 240 upon which it sits. The sensors 280 in this embodiment are a pair of eddy current sensors that measure rotation of the swing arm 268 around its centerline 296, and translation of the swing arm in a direction perpendicular to its front/back plane 302 as seen in FIG. 22. It is recognized that the sensors 280 that determine the rotation of the swing arm 268 can be other sensors such as, for example, but not limited to, capacitance gauges or other types of sensors capable of measuring small mechanical displacements that change at high frequency. In addition, the fast tool servo 250 has a pair of panels or side stiffeners 282 that extend from the upper base portion 258 to the lower portion 260 and provide for stiffening.

The actuator 256 is shown to be mounted to the upper portion 258 of the base 254. The thermally insulating spacers 264 support and thermally insulate the actuator 256 from the base 254 therein restricting the flow of heat from the actuator 256 into the base 254. In addition, the actuator 256 is surrounded by the enclosure 266 that allows for controlled removal of heat generated by the actuator 256 during use. The interface between the actuator 256 and the swing arm assembly 252 can be seen. The actuator 256 has an output shaft 286, as best seen in FIG. 28, which extends downwardly and is received by a clamp 288 on the swing arm assembly 252, as best seen in FIG. 21.

Referring to FIG. 21, the swing arm assembly 252 has a swing arm 268 that has a front face 290, a rear face 292, and a clearance cut 294. The swing arm 268 has an axis of rotation 296 that nominally coincides with the long axis of the swing arm 268. The swing arm 268 has an upper hub 298 and a lower hub 300. The clearance cut 294 is located approximately midway between the upper hub 298 and the lower hub 300. The clearance cut 294 extends from the front face 290 of the swing arm 268 through the axis of rotation and slightly beyond. A front/back plane 302, as best seen in FIG. 22, extends through the axis of rotation 296 and is parallel to the front face 290. A back clearance surface 304 of the swing arm 268 is parallel to and spaced from the front/back plane 302. The clearance cut 294 allows the cutting tool edge 96 and a small portion of the cutting tool 90 to protrude from the back clearance surface 304 of the swing arm 268, as seen in FIG. 22, and allows the workpiece to extend into the swing arm 268 as much as possible.

As will be described in further detail hereinafter, the fast tool servo system 250 has several mechanisms for damping of motion. There is a desire to dampen the motion so that unintentional motion does not propagate. With respect to this, the fast tool servo system 250 has a damping plate 308 that is secured to the lower hub 300 of the swing arm 268. The damping plate 308 is interposed between the lower portion 260 of the base 254 and a bottom plate 314. The bottom plate 314 has a circular groove 318 that receives the damping plate 308.

A viscous fluid such as grease, or a viscoelastic material, is constrained between the damping plate 308 and the lower portion 260 of the base 254 and the bottom plate 314. Rotation of the swing arm 268 causes relative motion between the damping plate 308 and the lower portion 260 of the base 254 and the bottom plate 314, producing a shear force in the grease or viscoelastic material that dissipates energy associated with rotation of the swing arm 268.

In an alternative embodiment damping of unwanted motion between the swing arm 268 and the base 254 is accomplished by the relative motion of an electrically conducting plate carried by one through a magnetic field that is referenced to the other resulting in eddy current losses in the plate.

As in the previous embodiments, the swing arm 268 is secured to the base 254 by a plurality of flexure blades. The lower and upper hubs 300 and 298 each have a pair of sectors of a cylinder or pie slice shaped grooves 320 for receiving the flexure blades, as seen in FIGS. 21-24.

Referring to FIG. 22, the swing arm assembly 252 has a pair of upper flexure blades 322 and a pair of lower flexure blades 324 secured to the swing arm 268. The pair of upper flexure blades 322 intersect each other at a groove 336 in each blade at a slot 326 in the upper hub as best seen in FIG. 23. The pair of lower flexure blades 324 intersect in a similar manner.

Still referring to FIG. 22, the swing arm 268 is shown with a portion broken away. The swing arm 268 has a bore 328 for receiving a screw 330 for retaining the cutting tool 90 as described below with reference to FIG. 23. The center point 98 as best seen in FIG. 2C on the cutting tool edge 96 lies nominally in the front/back plane 302 of the swing arm 268.

Referring to FIG. 23, a back perspective view of the swing arm assembly 252 is shown. The lower pair of flexure blades 324 are positioned in the lower hub 300 by sliding them up into a slot 332 in the lower hub 300. The upper pair of flexure blades 322 are slid into position one at a time into the slot 326 in the upper hub 298 wherein the blade extending from the left front to the right rear in FIG. 23 is inserted first in position and the other blade is slid above and slid down such that the center grooves slots 336 engage. The center slots 336 are similar to that shown in FIG. 8 as related to the first embodiment.

The swing arm assembly 252 has a tool clamp flexure 338 that has a forward arm 340 as seen in FIG. 22 that is biased by the screw 330 into engagement with the cutting tool 90. Referring back to FIG. 23, the tool clamp flexure 338 has a back 342 that is secured to the rear face 292 of the swing arm 268. The screw 330 provides for biasing the forward arm 340 to secure the tool similar to the arrangement in FIG. 7 as related to the first embodiment. In the alternative, a screw can pull the cutting tool 90 in a downward direction using the lower hole.

FIG. 24 shows a front perspective view of the swing arm 268 with the upper pair of flexure blades 322 secured to the upper hub 298 and the lower pair of flexure blades 324 secured to the lower hub 300. The swing arm assembly 252 has a pair of blocks 344 associated with each of the upper hub 298 and the lower hub 300 for securing the respective flexure blades 322 and 324. A fastener 346 extends through the block 344 through a hole 348 in the flexure blade and into a threaded hole 349 in the hub, and a fastener 347 extends through a clearance hole in the hub into a threaded hole 345 in the block 344 as seen in FIG. 23, for securing the flexure blades 322 or 324 between the block 344 and the surface of the sector groove of the hub.

The swing arm 268 has a right/left plane of symmetry 350 that contains the swing arm axis of rotation 296 and is perpendicular to the front/back plane 302 as shown in FIG. 22. The right/left plane of symmetry 350 is analogous to the right/left plane of symmetry 136 as shown in FIG. 5. The slot 138, 139 in the swing arm 268 that receives the cutting tool 90 has a plane of symmetry 140 that divides the slot into a right half and a left half portion. The slot 138, 139 is located in the swing arm 268 approximately midway between the upper hub 298 and the lower hub 300. The slot plane of symmetry 140 is parallel to the right/left plane of symmetry 350 and is offset from the swing arm axis of rotation 296 by a distance equal to the offset radius 142. The center point on the cutting tool (analogous to the center point 98 in FIG. 2C) is in the plane of symmetry 140 of the slot 138, 139 and therefore offset from the swing arm right/left plane of symmetry 350 by a distance equal to this offset radius 142.

FIG. 25 is a perspective view of the base 254 of the fast tool servo system 250. The base 254 has the upper portion 258 and the lower portion 260 with a generally circular cutout 354 with additional portions cutout 356 for forming an “x” shape for receiving the ends of the flexure blades 322 and 324. The “x” shape is oriented to maximize the clearance between the base 254 and the workpiece 50. In a preferred embodiment the portions cutout 356 are oriented so that the flexure blades 322 and 324 are at a 45° angle from the surface-normal of a workpiece at the point of contact between the cutting tool 90 and workpiece 50.

A plurality of holes 358 extend from the cut-out portions 356 to the outer surfaces 360 of the upper and lower portions 258 and 260 of the base 254 to receive a plurality of tensioning rods 362 as shown in FIG. 26. Additional holes 364 extend from the cut-out portion 356 to the outer surface 360 of the base 254 in order to allow the flexure blades to be secured by a plurality of clamping blocks 380 after being properly tensioned as seen in FIG. 27. The base has an opening 366 on a back surface 368 behind the cylindrical cut-out 354 that is used in conjunction with mounting the sensors 280.

Referring to FIG. 26, a back bottom perspective view of the swing arm assembly 252 including the flexure blades 322 and 324 with one of the four tensioning devices is shown in accordance with a preferred embodiment of the present invention. Each of the upper and lower flexure blades are placed in tension prior to fixing the blades 322 and 324 to the base. One of the upper flexure blades 322 is shown with a pair of tensioning rods 362. Each tensioning rod 362 has a pin 370 that is received in a slot 372 in the flexure blade 322 or 324. The tensioning rod 362 has a washer 374 and a threaded nut 376 at the other end which engage the base 254 in pulling the ends of the flexure blades 322 away from each other (i.e., place the blade in tension). One of the tensioning rods 362 has a spring device 378 for providing a finely controlled tension force on the flexure blades 322 or 324 as the nut 376 is turned. Differentially adjusting the nuts 376 on a pair of tensioning rods 362 causes displacement of the swing arm axis of rotation 296, in a direction along the long axis of that pair of tensioning rods, relative to the base 254. By differentially adjusting each of the four pairs of tensioning rods 362 the orientation and location of the swing arm axis of rotation 296 can be adjusted relative to the base 254 before the outer ends of the flexure blades 322 and 324 are fixed to the base with the clamping blocks 380. The clearance hole in the flexure blade is large enough to accommodate this adjustment without interference.

Each flexure blade 322 has a pair of clamping blocks 380 mounted to the blade that are received within the cut-out portion 356 of the base 254. These blocks 380 each receive a fastener to secure the flexure blades 322 and 324 to the base 254 in tension after the swing arm axis of rotation 296 is aligned to the base 254 and the flexure blades are tensioned.

In addition, still referring to FIG. 26, the lower portion of the lower hub 300 has a pair of attachment holes 382 below where the lower flexure blades 324 are slid into position in the slot 332. If the damping plate 308 is attached, such as shown in FIG. 21, the damping plate 308 is attached to the lower hub 300 using these attachment holes 382.

On each side of the center portion of the swing arm 268 there are disposed a pair of plates 384, one shown in FIG. 26, for help in damping unwanted motion of the swing arm 268. The back 342 of the tool clamp flexure 338 is secured to the rear face 292 of the swing arm 268. In a preferred embodiment, the eddy current sensors 280 are shown engaging the rear face 292 of the swing arm 268.

Referring to FIG. 27, the swing arm assembly 252 is positioned in the base 254, the hubs 298 and 300 are located in their respective cylindrical cut-out 354 portion. The clamping blocks 380 for securing the swing arm assembly 252 to the base 254 are shown such that the flexure blades 322 and 324 are interposed between the blocks 380 and the wall of the additional cutout 356. The tensioning rods 362 are shown extending through the hole 358 in the upper portion 258 of the base 254. The additional holes 364 are used to secure fasteners to the clamping block 380 to retain the flexure blades 322 and 324.

The sensors 280 are shown extending from the opening 366 in the base 254 to the swing arm 268. The tensioning rods 262 are shown in the upper portion; similar rods are used in the lower portion but are not shown in this figure. After the flexure blades 322 and 324 are fixed to the base 254 by the clamping blocks 380, the tensioning rods 362 can be loosened by backing off nuts 376, although it is generally not necessary to do so. The cutting tool 90 is projecting from the slot 138, 139 in the swing arm 268.

Referring to FIG. 28, the upper chip shield 270 and the lower chip shield 272 are shown secured to the base 254. The swing arm 268 has a pair of annular rings or skirts 390 that interact with the shields 270 and 272 as described with respect to the first embodiment.

The swing arm assembly 252 has a plurality of hard stops 392. The hard stops 392 are retained by the upper chip shield 270. The hard stops 392 prevent excessive rotation of the swing arm 268 that can damage the flexure blades 322 and 324, and work identically as described and shown in the embodiment illustrated in FIG. 14. Referring to FIG. 14, a small gap 213 between an end of each hard stop 392 (212) and the swing arm 268 (102) allows normal rotation of the swing arm. The hard stops 392 (212) act in pairs to limit the rotation angle of the swing arm 268 (102) to prevent damage to the upper and lower pairs of flexure blades 322 and 324. Excessive rotation of the swing arm 268 (102) causes closure of a pair of gaps 213 that limits rotation of the swing arm.

The sensors 280 are shown in a mounting block 394 mounted to the back face or back surface 368 of the base 254. The output shaft 286 of the actuator 256 is held by the clamp 288 to connect the actuator 256 to the swing arm assembly 252. It is recognized that a flexible coupling can be used between the output shaft 286 and the swing arm assembly 252 to accommodate misalignment, between the output shaft of the actuator and the swing arm assembly.

FIG. 29 is a side view of the fast tool servo system 250 in accordance with a preferred embodiment of the present invention and is a view similar to that of FIG. 20. The cutting tool 90 is shown engaging the working piece 50 retained on the workpiece holder 51. The upper chip shield 270 and the lower chip shield 272 protect the upper flexure blades 322 and the lower flexure blades 324, as seen in FIG. 27 from chips and debris that are produced during machining. The sensor 280 is shown engaging the rear face 292 of the swing arm 268. In addition, the tool clamp flexure 338 is shown secured to the swing arm.

The thermal insulating spacers 264 restrict the flow of heat from the actuator 256 into the base 254. The enclosure 266 encircles the actuator 256 to allow controlled removal of heat. The side stiffeners 282 stiffen the base 254.

In a preferred embodiment, the system for a high bandwidth rotary fast tool servo establishes the swing arm axis of rotation 296 and 46 in a vertical direction. Other preferred embodiments of the system can establish the swing arm axis of rotation 296 in a horizontal direction, or any other direction, depending on the intended application of the fast tool servo.

In operation, the fast tool servo 250 is used in conjunction with the machine tool 240, for example, a precision lathe, as shown in FIG. 18. The spindle 243 rotates about a horizontal axis whereas the rotating table 242 rotates about a vertical axis. In addition, one of the units moves in the cross-slide direction that is in and out of the page with respect to FIG. 18 whereas the other one is capable of moving into the in-feed slide position that is in a left and right direction. The position and velocity of the cross-slide and in-feed slide are measured within a precision lathe controller 412. In addition, the rotation position and velocity of the workpiece 50 and the auxiliary spindle (rotary table) 242 can be measured with sensors located in the machined tool 240.

FIG. 31 shows a schematic diagram of the inter-relationship in control of the fast tool servo system 250 with that of a precision lathe or machine tool 240. The machine tool 240 with rotating table 242 such as shown in FIG. 18, 19, or 32A-C has sensors to determine the position of the workpiece spindle 243 and therein the workpiece 50. The spindle 243 is held by a base unit, which is capable of moving in at least one direction. The position of the base unit, the rotational speed and position of the workpiece spindle 243 form inputs into a precision lathe controller 412. The rotating table 242, on which the fast tool servo 250 is mounted, is capable of being moved in a controlled fashion in a direction perpendicular to the direction of the base unit in addition to rotating about a vertical axis. The translational and rotational positions of the rotating table are likewise input into the precision lathe controller 412. In addition to the sensors within the precision lathe 240, the fast tqol servo 250 has a plurality of sensors 280 and 406. With respect to the base 254, the position of the swing arm 268 is detected. With sensors such as, for example, sensors 280 as shown in FIG. 29, the rotation position and translation of the swing arm 268 in a direction perpendicular to its front/back plane 118, 302 is detected.

The fast tool servo controller 402 uses feedback information via the sensor amplifiers from the sensors 280 and additional sensors 406 to compute the position and velocity of the tool 90, and produces a command signal for the fast tool servo actuator 256. The command signal from the fast tool servo controller 402 to the actuator 256 is modified by a signal conditioning amplifier that uses feedback from the actuator 256, and the signal indicative of the modified command forms an input to a power amplifier that drives the actuator 256. The fast tool servo controller 402 may synthesize angular velocity information for the swing arm 268 from the position sensors. In an alternative embodiment, a velocity sensor such as, for example, a tachometer is disposed on the actuator.

In a preferred embodiment, the fast tool servo controller 402 is the master controller and the precision lathe controller 412 is the slave controller. Sensors associated with the precision lathe 240 may provide feedback information regarding the position and velocity of the cross-slide, in-feed slide, spindle, and rotating-table to both the precision lathe controller 412 and the fast tool servo controller 402. The fast tool servo controller 402 uses the precision lathe sensor information and the fast tool servo sensor information 280 and 406 to compute the spatial relationship between the workpiece 50 and the tool 90. The fast tool servo controller 402 compares the computed relationship between the workpiece 50 and the tool 90 to the desired relationship between the workpiece and the tool, and generates commands to the precision lathe controller 402 to position and orient the cross-slide, in-feed slide, spindle, and rotating table, and also generates commands to the fast tool servo controller to position the tool 90. The precision lathe controller uses feedback information from the precision lathe sensors to compute signals that are issued to the precision lathe actuators to affect the commanded positions and orientations of the cross-slide, in-feed slide, spindle, and rotating table. The fast tool servo controller 402 uses feedback information via the sensor amplifiers from the sensors 280 and additional sensors 406 to compute the position and velocity of the tool 90, and generates a command signal for the fast tool servo actuator 256. The command signal from the fast tool servo controller 402 to the actuator 256 is modified by a signal conditioning amplifier that uses feedback from the actuator 256, and the signal indicative of the modified command forms an input to a power amplifier that drives the actuator 256.

In a preferred embodiment, the fast tool servo system can be a computer numeric control (CNC) machine tool system. A preferred embodiment of the present invention can include a programmable computer.

In an alternative embodiment the precision lathe controller 412 is the master controller and the fast tool servo controller 402 is the slave controller. In this embodiment the fast tool servo controller 402 is responsible for local control of the tool 90 as described with respect to the previous embodiment, and the precision lathe controller 412 is responsible for local control of the precision lathe 240 as described hereinbefore. In this embodiment, the fast tool servo controller 402 may provide the precision lathe controller 412 with information on the position and velocity of the tool 90. The precision lathe controller 412 treats the fast tool servo system 250 as an additional machine axis under its command and synchronizes the position and velocity of the tool 90 with the position and velocity of the cross-slide, in-feed slide, spindle, and rotating table in accordance with the desired relationship between the tool 90 and workpiece 50.

In a preferred embodiment, the fast tool servo controller 402 with an actuator 256 having the capability of two-thousand movements per second and a range of travel of ±0.14 degrees, sensors 280, and an offset radius 142 of 5 mm allows the fast tool servo 250 to develop a tool tip acceleration in excess of 25 g's following a 5 micron peak to valley sinusoidal surface with 50 nm accuracy at 2 kHz.

The cutting edge 72 on the cutting tool 90 is spaced from the axis of rotation 46, 296 by an offset radius 142 as shown in FIGS. 5 and 24. Rotation of the swing arm 102, 268 caused by the actuator 68 causes a controlled rapid movement of the cutting edge into and out of engagement with the workpiece as the spindle rotates therein, allowing the production of work pieces with complex shapes. For example, referring to FIG. 30, a stasphere shape having a plurality of icosahedron or multiside polyhedron features such as, for example, depressions or dimples with smooth or abrupt transitions between surfaces is produced by the rotation of the workpiece on the spindle as the cutting edge is moved into and out of engagement with the material while the rotating table 242 carries the fast tool servo 40, 250 from the pole of the workpiece to its equator. In addition, the applications of the preferred embodiments include production of lenses for telescopes or ophthalmics.

FIGS. 32B and 32C illustrate views of a precision lathe having a workpiece 486 and a fast tool servo system in accordance with a preferred embodiment of the present invention. These figures illustrate enlarged views of the fast tool servo system, which is placed on a rotary table 488, in relation to the workpiece 486, the cross-slide 452 and in-feed slide 462 described hereinbefore.

FIGS. 33A and 33B are schematic diagrams of a variable reluctance actuator in accordance with a preferred embodiment of the present invention. In a preferred embodiment the actuator and swing arm are an integral unit. This embodiment includes a normal-direction variable reluctance rotary actuator for an approximately 10 kHz arid higher rotary fast tool servo system. Two pairs of actuators provide back and forth rotation of a swing arm 530 that holds a tool 522 at a location spaced from the axis of rotation, creating a tool motion towards and away from a workpiece. In a preferred embodiment, using a flux density of approximately 1.5 Tesla, a 1000 g's of tool acceleration required to follow a 5 micron peak to valley sinusoidal surface at, for example, 10 kHz can be achieved. This alternative preferred embodiment operates using the principle of variable reluctance wherein a force is generated between two components in a magnetic circuit as it naturally attempts to reduce the overall reluctance of the magnetic circuit. In the present embodiment, reducing one or more of the air gaps between the movable rotor 546 and the stator 543 reduces the reluctance of the magnetic circuit. The permanent magnets 540 and 542 provide magnetic flux biasing so that the magnetic flux generated by the current (i) in the coils 544 causes rotation of the rotor 546. For the direction of the current (i) shown in FIG. 33B the magnetic flux generated by the coils 544 is steered by the permanent magnets 540 and 542 from the upper left corner of the rotor 546 to the lower right corner of the rotor causing clockwise rotation of the rotor. Reversing the direction of the current (i) shown in FIG. 33B causes the magnetic flux generated by the coils 544 to be steered by the permanent magnets 540 and 542 from the lower left corner of the rotor 546 to the upper right corner of the rotor causing counter-clockwise rotation of the rotor. A normal-direction variable reluctance actuator is an electromagnet that closes the gap between itself and a target. The attractive force increases with the inverse of the gap squared and can thus provide a small stroke actuator with a high force density. FIG. 33B illustrates stators having windings 544, which can be formed out of various coils. A permanent magnet system 540, 542, is disposed between the stators. A rotor 546 is disposed in the center of the permanent magnets. The system induces a force that provides for the back and forth rotation of the rotating swing arm 530 that holds the tool 522. The geometry of the flexures 524, 526, 528 is optimized to provide the necessary guidance and support of the swing arm.

FIG. 34 illustrates a variable reluctance fast tool servo employing an armature 564, tool 566, first actuator 560 and second actuator 562. The servo may be used in a biased manner to facilitate linear operation or it may be operated in an unbiased configuration. Armature 564 may be supported on flexures or air, oil, or on plain or rolling element bearings.

FIG. 35A illustrates a variable reluctance actuator comprising a tool 566, a backside endplate 568, a bias side air gap 570, a tool side air gap 572, a tool side endplate 574, an inner magnetic shell 576, an outer magnetic shell 578, a permanent magnet 580 and a tubular backbone 582. The actuator of FIG. 35A has an axis of motion across the page (i.e., left to right) and has the tool 566 mounted on the centerline of the actuator.

FIG. 35B illustrates an end view of the variable reluctance actuator taken along line A-A′ showing the inner magnetic shell 576, the outer magnetic shell 578 and the direction of the magnetic flux radiating outward.

FIG. 36A illustrates the armature of FIG. 35A and shows the magnetic backside endplate 568, the magnetic tool side endplate 574, and the non magnetic tubular backbone 582. FIG. 36A also illustrates tool 566 mounted along the centerline as well as showing alternative tool mounting locations 566A and 566B proximate to the outer edges of tool side endplate 574.

FIG. 36B illustrates an exploded view of the stator of FIG. 35A. The stator is comprised of a backside coil 584, a magnetic outer shell 578, a permanent magnet 580 for providing radial magnetization, a magnetic inner shell 576 and a tool side coil 586.

FIG. 37 illustrates an embodiment where the armature and stator (optionally) can be supported on flexures and bearings, or air bearings, or fluid hydrostatic bearings to constrain motion to only axial motion. If the stator is suspended on bearings, it can serve as a reaction mass. The stator can also use air or fluid for cooling and/or clamping. The embodiment of FIG. 37 employs two stator flexures 590 and two armature flexures 588.

FIG. 38A illustrates a permanent magnet biased actuator employing a single winding 587 for producing a linear motion in the vertical plane (top to bottom in the plane of the page).

FIG. 38B illustrates an embodiment of a permanent magnet biased rotary actuator as used in general scanning applications. The rotary actuator of FIG. 38B comprises a magnetic left yoke 592 having a left winding, a magnetic right yoke 594 having a right winding, an armature 595, and a permanent magnet 596. The axis of rotation 598 about the center of the armature of the rotary actuator of FIG. 38B is counter clockwise in the plane of the page.

FIGS. 39A and 39B illustrate current biased actuator configurations. The current biased configurations can use bias current to replace permanent magnets. Using current allows adjustable bias levels; however, it requires more power dissipation due to the current in the coils used for bias.

FIG. 39A illustrates a current biased actuator having linear motion in a vertical direction in the plane of the page. The actuator comprises a first coil 602 and second coil 600 wound around an “H” shaped core 604.

FIG. 39B illustrates a four coil configuration of a current biased actuator having rotary motion in a counter clockwise direction 616 in the plane of the page. The actuator of FIG. 39B comprises a first coil 608, a second coil 610, a third coil 612, a fourth coil 614 and a core 606.

Linear fast tool servos are one configuration that can be used to make ophthalmic lenses, and these have the advantage that they are easier to measure and calibrate. However, they have significant reaction forces if high accelerations are used. For example, if the tool is moved in a sinusoid of 5 μm peak-to-peak amplitude, then the motion can be described as: x(*)=2.5<10⁻⁶ sin ωt meters where ω is the frequency of oscillation. More generally, for a peak-to-peak amplitude of A, the motion is described by:

$x{{(*}{)\; = {\frac{A}{2}\omega^{2}{{sin\omega}t}}}}$ and the peak acceleration is

$\frac{A}{2}\omega^{2}$

If we choose A=25.10⁻⁶ m, and ω=2π×10⁴ (10 kHz), then we find:

$\begin{matrix} {\chi_{\max} = {{{\frac{2.5 \times 10^{- 6}}{2}\left( {2{\pi \times 10^{4}}} \right)^{2}} \cong {5000\mspace{14mu} m\text{/}\sec^{2}}} = {500\mspace{11mu}{G'}s}}} & \; \end{matrix}$

This high acceleration can result in very significant forces. For example, if the moving mass is 10 gm, the resulting force is F=ma=0.01·5000=50N.

FIG. 40 provides an illustration showing the relationship between these forces. Such a large force can shake the precision machine, which carries that fast tool servo. Thus in some cases, it will be necessary to use a balance or reaction mass to absorb these forces. By way of example, a force F₁ is used to provide the driving force to the fast tool servo 620. The majority of this force is applied to the balance mass 618, resulting in its acceleration. Thereby, the large FTS forces do not need to be applied to the machine frame 619. The force F₂ (termed the “drift force”) prevents the assembly from drifting out of range, by applying a corrective action to keep the average balance mass position at the center of travel.

Such a reaction mass configuration is shown in FIG. 37. Here F₁ is the force on the tool servo, and the stator serves as a balance mass by moving independently on the indicated flexures. Force F₂ is generated by any conventional means such as, for example, coils, magnets, electromagnets, and the like to control drift.

It is also possible to design analogous balance masses for rotational fast tool servos. However, it is usually easier to have a machine frame tolerate reaction torques, since the moment of inertia for a mass increment dM scales as dMR and since plates are stiffer in shear than in bending.

The movement of the tool servo can be constrained in translation (linear FTS) or in rotation (rotary FTS) by any of the bearing technologies used in precision motion control systems. These include flexures, rolling element bearings, air bearings, hydrostatic bearings, or magnetic bearings.

It may also be desirable to introduce controlled gaps filled with air, oil, ferrofluid, or other appropriate damping material, such as, for example, Sorbothane, etc., in order to introduce controlled damping for the FTS motions.

FIG. 41 illustrates a schematic diagram showing the forces applied in a FTS. In particular, FIG. 41 shows motion in a right/left direction on the page in relation to shear damping using oil 622, shows motion in an up/down direction in relation to the page using a squeeze film damping 624 and angular motion in a counter-clockwise direction in relation to the page using oil 622 as a squeeze film in the xy plane. The magnetic cores in FTS's will be laminated, or made of metallic glass, or made of sintered material in order to reduce the effects of eddy currents and thereby preserve high bandwidth.

The nonlinear effects of the variable reluctance actuators can be addressed by some combination of the following techniques. Permanent magnet or coil-based biasing lowers the effect of nonlinearities. The actuator nonlinearities can be modeled and an inverse nonlinear model implemented in the computer control system, typically on a digital computer. For example, if the actuator force varies as

$F = {C\left( \frac{i}{g} \right)}^{2}$

then the calculation

$i_{s} = {g\sqrt{\frac{Fd}{c}}}$ results in linearity. Here F is the actuator force, I is the coil current, g is the actuator gap, C is a constant, Fd is a desired force in the controller, and is a current setpoint to a current controlled amplifier. Flux sensing can be implemented either via the use of a flux sensor in or adjacent to the gap (Hall cell, magneto resistive, etc.) or via flux sensing coils wound on the actuator pole faces.

FIG. 42 illustrates an actuator having a coil 628, stator 626 and armature 630 and Hall cells 631 a and 631 b. In addition, FIG. 42 shows a Hall cell further having a servo coil 632.

FIG. 43 illustrates an actuator derived from a Hall cell. The embodiment of FIG. 43 facilitates motion about a vertical axis. Rotation may be about a first axis 629 forming a vertical plane touching the tip of tool 566 or rotation may be about a second axis passing through armature 630. The embodiment of FIG. 43 comprises an armature 630, a tool 566, a lower stator 626A, having two legs, an upper stator 626B, having two legs, a permanent magnet biasing member 634, a lower first coil 632A, a second lower coil 632B, a first upper coil 632C and a second upper coil 632D. The permanent magnet biases the 4 legs forcing the armature. The coils 632A-D on the legs steer the flux to create a torque on the armature 630. Armature 630 may be suspended on some form of bearing to constrain motion to rotation. Flexures, rolling element, air, oil hydrostatic restraint and other means may alternatively be employed to constrain motion.

FIG. 44A presents top view of the embodiment shown in FIG. 43, FIG. 44B presents a side view of the embodiment of FIG. 43 and FIG. 44C presents a face view of the embodiment of FIG. 43.

FIGS. 45A and 45B illustrate embodiments of an actuator employing bias flux from permanent magnets to provide preload force for pressurized air or oil hydrostatic bearings 636. Oil film or air film in a bearing provides compressive and shear damping. In some situations it may not be possible to use axis #1 (long reach tool), in which case, an alternate axis can be used. FIG. 45B illustrates axis #2 being employed as the axis of rotation.

FIGS. 46A and 46B illustrate rotational fast tool servos that can have an axis of rotation oriented either vertically (FIG. 46B) or horizontally (FIG. 46A). FTS motion can be sensed by precision motion sensors such as capacitive displacement probes, inductive displacement probes, optical probes, or other means. The embodiment of FIG. 46A comprises a spindle 638, post 640, and tool 566.

FIGS. 47A and 47B illustrate a radial configuration of flux-biased coils capable of steering flux from front to back side of armature, and thereby creating axial thrust. The embodiment of FIG. 47A comprises cores 642A and 642B radially disposed around an armature 648 and employing bias magnets 650A and 650B. In addition, the embodiment of FIG. 47 A comprises coils 644A, 644B, and 644C, a mechanical structural backbone 646 and a tool 566. Motion is left/right with respect to the page for the embodiment of FIG. 47A. FIG. 47B illustrates a back end view of the embodiment of FIG. 47A and comprises eight cores 652A-H, eight coils 654A-H and eight bias, permanent magnets 656A-H.

FIG. 48 illustrates a core having a wedge-shape, which reduces or eliminates the occurrence of back-iron saturation.

FIG. 49 illustrates a micropositioner 700 in accordance with an alternative embodiment of the present invention. The micropositioner 700 contains an outer movable shell, which is better illustrated by the cross-sectional side view of the micropositioner 700 shown by FIG. 50. Referring to both FIG. 49 and FIG. 50, the outer movable shell 710 contains a first end cap 712, a second end cap 714, and at least one non-magnetic strut 713 that is connected to the end caps 712, 714 so that the end caps 712, 714 move together. The end caps 712, 714 are magnetic. It should be noted that while FIG. 50 illustrates the non-magnetic strut 713 being connected to side portions of the first and second end cap 712, 714, other configurations may be provided, such as, but not limited to, the non-magnetic strut 713 connecting to a bottom of the first end cap 712 and a top of the second end cap 714.

The micropositioner 700 also contains at least one securing device 800 for allowing the micropositioner 700 to be secured to a structure, while the outer movable shell 710 is capable of moving in a positive or negative X-axis. The securing device 800 is removably connected to an outer magnetic pole-piece 720, as well as the structure to which the micropositioner 700 is secured.

A magnetic element is located within the micropositioner 700, containing the outer magnetic pole-piece 720 and an inner magnetic pole-piece 722 located within the outer magnetic pole-piece 720. At least one permanent magnet 724 is located between the inner magnetic pole-piece 722 and the outer magnetic pole-piece 720. It should be noted that in accordance with the alternative embodiment of FIG. 49 and FIG. 50, one permanent magnet is provided.

At least one coil is located between the outer magnetic pole-piece 720 and the inner magnetic pole-piece 722. FIG. 50 illustrates the example of two coils 726, 728 being located between the outer magnetic pole-piece 720 and the inner magnetic pole piece 722, where the permanent magnet 724 is located between the coils 726, 728. In FIG. 50 the coils 726, 728 are illustrated as having a positive current going into the page at the “X” and coming out of the page at the black dot.

The magnetic properties of the end caps 712, 714, the inner magnetic pole-piece 722, and the outer magnetic pole-piece 720 may be provided, for example, by their being fabricated from powdered metal material, a solid magnetic material, or laminated with a magnetic material. Examples of magnetic materials may include, but are not limited to, steel, silicon steel, cobalt steel, nickel iron, stainless steel, and many other materials. One having ordinary skill in the art would know examples of other magnetic materials that may be used.

FIG. 51 is a schematic diagram illustrating coil and magnetic flux paths of the micropositioner 700. One feature of the micropositioner 700 is that a force is applied that is linear in coil current and stage (outer movable shell) displacement. As shown by FIG. 51, the permanent magnet 724 provides biasing flux (shown as solid arrow lines) to upper and lower air gaps 732, 734. The permanent magnet 724 biasing flux is independent of coil current and essentially is a linear function of position due to the length of the permanent magnet 724 being much larger than the length of the air gaps 732, 734. Superimposed upon the biasing flux is a coil flux (shown as dotted arrow lines). The biasing and coil fluxes are shown as being in the same direction in the lower air gap 734 and being in opposite directions in the upper air gap 732. Therefore, the net force on the outer movable shell 710 is then the difference of the two magnetic forces caused by the magnetic fluxes and is linear in coil current and outer movable shell 710 displacement, while the permanent magnet 724 is much longer than the air gaps 732, 734.

Returning to FIG. 50, the outer movable shell 710 is connected to the outer magnetic pole-piece 720 via at least one rubber bearing 740. FIG. 52 better illustrates positioning of rubber bearings 740 within the micropositioner 700. In accordance with the present exemplary embodiment of the invention, the micropositioner 700 contains four rubber bearings 740 in the form of sheets. The use of rubber bearings between the outer movable shell 710 and the outer magnetic pole-piece 720 provides guided motion without the disadvantages of friction, stiction, and vibration of rolling or sliding bearing systems.

Rubber bearings provide the capability of providing a compact package, while constraining five degrees of freedom. FIG. 53 is a schematic diagram further illustrating positioning of rubber bearings 740 and degrees of freedom. The unconstrained degree of freedom for a rubber bearing 740 is the motion parallel to the plane of the rubber bearing 740. As a result, the micropositioner 700 has one degree of freedom, which is in the x-axis. In FIG. 53, the four rubber bearings 740 are numbered 1, 2, 3, and 4.

It should be noted that stainless steels often present adhesive problems due to low surface energy. As a result, use of a primer coating would be an appropriate method to increase bond strength. Another method that improves adhesion, and that is beneficial on stainless steels to maximize corrosion resistance, is passivation. Passivation is a process by which a uniform protective oxide film is created on the exposed surfaces of stainless steels and all containments are removed from the surface. Passivation is beneficial if performed on micropositioner components prior to application of a primer coat in commercial applications of cast rubber bearings.

In accordance with an alternative embodiment of the invention, the rubber bearings may be provided as o-ring bearings. FIG. 54A and FIG. 54B are cross-sectional side views of an alternative micropositioner 750 where an outer movable shell 752 is suspended on a series of stacked o-rings 754 with bulging interference (FIG. 54A) and without bulging interference (FIG. 54B).

The following provides an example of a method that may be used to obtain the o-ring bearings. An initial step in preparing to design the micropositioner 750 is to consider the methods available for constructing the rubber bearing. One method, as shown by FIG. 54A and FIG. 54B is to stack standard and readily available o-rings one on top of another around a square or circular post. The stacked o-rings provide sufficient constraint stiffness in the radial direction to be practical in a micropositioner.

Two cases of particular interest are the o-rings on a round post and the o-rings on a square post suspending the outer movable shell on an inverse post geometry. FIG. 54A shows an o-ring spacing scheme that will have a stiffness that approaches that of a solid sheet when the spacing is less than an o-ring thickness, due to the constraint each bulging o-ring will place on the others. This interfering configuration is referred to as having bulging interference. The two stiffness limits of the bulging interference configuration are the continuous sheet stiffness and the stiffness of n single o-rings with no bulging interference, where n is the number of o-rings in the stack. When the o-rings are very tightly spaced the o-ring stack stiffness will approximate a continuous rubber sheet. Large spacing between the o-rings, such as that illustrated by FIG. 54B, will eliminate the stiffening effect of the bulging interference and the stiffness will be that of n single o-rings.

The rubber bearings may be provided by many different processes. While the exemplary embodiment of FIG. 50 contains sheet rubber bearings that are fabricated using a standard rubber processing method, and which are later glued in place, in accordance with an alternative embodiment of the invention, the rubber bearings may be cast in place.

The casting process involves creating a mold that will restrain liquid rubber in a desired shape until after vulcanization occurs. Vulcanization of the liquid rubber can be initiated in a number of ways. The primary goal of the casting process is to create a rubber sheet that is firmly adhered to the outer magnetic pole-piece 720 and that is devoid of any air bubbles. Accomplishing this goal requires priming the outer magnetic pole-piece 720 to promote adhesion, removing trapped air bubbles from the liquid rubber mixture, and filling the mold completely.

A beginning step in preparing the outer magnetic pole-piece 720 for adhesion may be to abrasively clean the outer magnetic pole-piece 720 with sandpaper to remove any rust or other adhered contaminates. Next, dust, machine oil, and any other contaminates are rinsed away. Optionally, a solution such as, but not limited to, rubbing alcohol, may be used to prepare the outer magnetic pole-piece 720 surfaces for application of a thin layer of adhesion promoter for use with liquid silicon rubbers. Preferably, the layer adhesion promoter extends well beyond the edge of the rubber bearing.

The removal of air and complete mold filling may be accomplished through the use of a vacuum pump and bell jar. A liquid rubber reservoir may be placed under the bell jar with the necessary plumbing for filling the mold in place. The bell jar and mold may then be evacuated simultaneously to, for example, but not limited to, 25″ Hg below atmospheric, which allows most air trapped in the liquid rubber to escape. Atmospheric pressure is then slowly allowed to fill the bell jar, although the mold and buffer are still evacuated.

Liquid rubber is then forced by air pressure to flow from the reservoir to the bottom of the mold. In order to assure filing of the mold, the rubber is allowed to continue flowing until it slightly fills a buffer container. The vacuum on the mold side of the reservoir is then replaced by atmospheric pressure. The buffer ensures that the mold remains filled after the vacuum is removed and as the rubber expands while vacuum is applied. With air pressure applied, voids in the mold are collapsed. The rubber vulcanizes under atmospheric pressure for a period of time, such as, but not limited to, twenty-four (24) hours before the mold is opened.

While the abovementioned refers to the use of rubber bearings, there are several situations where metal flexures are better suited as a positioning system. Examples include, but are not limited to, in elevated or ultra-low temperatures and rubber unfriendly environments (e.g., ozone, high oxygen environments, and strong oxidizers). FIG. 55 is a schematic diagram illustrating an example of the use of metal flexures 760 instead of rubber bearings 740. In addition, FIGS. 56A and 56B are schematic diagrams further illustrating a metal flexure 760 before (FIG. 56A) and after (FIG. 56B) flexure.

Referring to FIG. 55, FIG. 56A, and FIG. 56B, each non-magnetic strut 713 is connected to the outer magnetic pole-piece 720 by at least one metal flexure 760, two of which are shown connecting to one non-magnetic strut 713 in FIG. 55. In accordance with this exemplary embodiment of the invention, a metal flexure 760 is secured to the outer magnetic pole-piece 720 via a bolt 762 that traverses through an opening in the metal flexure 760. It should be noted that, as shown in FIG. 55, it is ideal to use two metal flexures 760 to secure each non-magnetic strut 713 to the outer magnetic pole-piece 720, where the metal flexures are horizontally opposite. One having ordinary skill in the art would appreciate that alternative metal flexure structural orientations may be provided to movably connect a non-magnetic strut 713 to the outer movable shell 710.

In accordance with one exemplary embodiment of the invention, integral capacitive position sensing devices may be used to determine position of the outer movable shell 710. As is shown by FIG. 57, the micropositioner 700 contains a first integral capacitive position sensing device 802 and a second integral capacitive position sensing device 804. It should be noted, however, that a single sensing device may be used. Each sensing device 802, 804 may be provided on a printed circuit board, ceramic, or other material, and contains an electrode 805 that is capable of determining a capacitance between an end cap 712, 714 and the electrode 805 of the position sensing device 802, 804. Preferably, the first position sensing device 802 is located above a top portion of the first coil 726 and the second position sensing device 804 is located below a bottom portion of the second coil 728. The position sensing device also contains a guard 803 located between the electrode 805 and a ground 807.

A change in capacitance between the first and second position sensing devices 802, 804 provides the distance between the position sensing device 802, 804 and the end cap 712, 714. Circuitry (not shown) for processing the change in capacitance between the position sensing devices 802, 804 may be provided on the micropositioner 700 or it may be provided separate from the micropositioner 700, but in electronic communication with the micropositioner 700.

As is shown by FIG. 57, the position sensing devices 802, 804 may be shaped similar to the coils 726, 728 so that the position sensing devices 802, 804 will fit around the inner magnetic pole-piece 722. It should be noted, however, that the position sensing devices 802, 804 may be shaped differently.

One having ordinary skill in the art would appreciate that other position measuring devices, such as, but not limited to, a laser interferometer, a glass scale encoder, and eddy current variable reluctance position sensors may be used for determining position of end caps. If using glass scale encoders, two glass scales could be integrated into the micropositioner 700 on opposite sides, and read heads may be located external to the micropositioner 700 to measure the position differential from one side of the micropositioner 700 to the other. Such a configuration can be used to evaluate stiffness of the outer movable shell 710 and to detect parasitic motions.

Alternative micropositioner configurations may be provided in accordance with the present invention, where the different configurations may provide different degrees of freedom. FIG. 58 is a cross-sectional side view of a micropositioner 850 having two degrees of freedom, namely, the X-axis and the Y-axis. Referring to FIG. 58, a center stage 852 is suspended on a rubber bearing sheet 854. Unfortunately, actuator nonlinearities of the micropositioner 850 are higher as the force within the actuator is dependent on both x and y stage positions. In addition, torsional stage stiffness is close to translational stiffness, meaning that torsion is unconstrained.

The micropositioner 860 configuration illustrated by FIG. 59 increases the translational torsional stiffness ratio by introducing a void, or lack of a rubber bearing sheet 862, near the center of the center stage 852. Specifically, the rubber bearing sheet 862 of FIG. 59 may be in the shape of a donut. The advantage of this configuration is that the torsional stiffness can now be designed independent of translational stiffness. The micropositioners of FIG. 58 and FIG. 59 contain an outer magnetic pole-piece 870 and the center stage 852, where the center stage acts as an inner magnetic pole-piece. The micropositioner 860 also contains the rubber bearing sheet 862. A permanent magnet 876 is located beneath the inner magnetic pole-piece 852 and is connected to the rubber bearing sheet 854, 862. At least one coil 878 is positioned between a side portion of the permanent magnet 876 and an internal side portion of the outer magnetic pole-piece 870. In addition to the abovementioned, a nonmagnetic strut 880 is positioned above the at least one coil 878 and the rubber bearing sheet 854, 862. Similar to the at least one coil 878, the nonmagnetic strut 880 is positioned between a side portion of the permanent magnet 876 and an internal side portion of the outer magnetic pole-piece 870.

FIG. 60 provides a top view of the micropositioners of FIG. 58 and FIG. 59. As is shown by FIG. 60, the center stage 852 is positioned central to the micropositioner 850. As mentioned above, the micropositioner configuration of FIG. 58 has two degrees of freedom, namely, the X-axis and the Y-axis.

FIG. 61 is a cross-sectional side view of a micropositioner 900 in accordance with another alternative embodiment of the invention. The micropositioner 900 of FIG. 61 is an ideal configuration for active vibration cancellation. The configuration is torsionally compliant and the rubber bearing portion is composed of a stack of o-rings 902. As shown by FIG. 61, the micropositioner 900 contains an inner magnetic pole-piece 904 and an outer magnetic pole-piece 906, where a permanent magnet 908 is positioned between a first coil 910 and a second coil 912. A movable portion 920 of the micropositioner 900 contains a first end cap 928 and a second end cap 930 connected to each other via a central non-magnetic strut 926 that is positioned within the inner magnetic pole-piece 904. The central non-magnetic strut 926 is separated from the inner magnetic pole-piece 904 by the stack of o-rings 902.

As shown by FIG. 61, the movable portion 920 of the micropositioner 900 is prevented from contacting top and bottom portions of the inner and outer magnetic pole pieces 904, 906 via a series of o-ring arrays 922. The series of o-ring arrays 922 provide for maintaining of an upper air gap 932 and a lower air gap 934. It should be noted that the micropositioner 900 configuration of FIG. 61 provides for one degree of freedom, which is in the X-axis.

Alternative micropositioner configurations may be provided where multiple inner or outer pole-pieces may be provided. As an example, FIG. 62 is a side cross-sectional diagram of magnetic portions within the micropositioner of FIG. 63. Referring to both FIG. 62 and FIG. 63, the micropositioner 940 contains an outer magnetic pole-piece 942 and a first and second inner magnetic pole-piece 944, 946. Similar to other micropositioner configurations, a permanent magnet 950 is positioned between a first coil 952 and a second coil 954. A movable portion 960 of the micropositioner 940 contains a first end cap 962 and a second end cap 964 connected to each other via at least one non-magnetic strut 966. Rubber bearing sheets 968 separate the outer magnetic pole-piece 942 from the non-magnetic strut 966.

As is shown by FIG. 62, there are two magnetic arrays 970, 972, wherein each magnetic array contains a first coil 952, a permanent magnet 950, and a second coil 954. The micropositioner configuration of FIG. 62 provides multiple degrees of freedom.

Another alternative embodiment of the invention having multiple pole pieces is illustrated by FIG. 64 and FIG. 65. FIG. 64 is a side cross-sectional diagram of magnetic portions within the micropositioner 1000 of FIG. 65. The micropositioner 1000 contains multiple magnetic pole-pieces in the form of a stack of magnetic pole pieces. Referring to FIG. 64 and FIG. 65, the micropositioner contains an first magnetic pole-piece 1002, a second magnetic pole-piece 1004, a third magnetic pole-piece 1006, a fourth magnetic pole-piece 1008, and a fifth magnetic pole-piece 1010. A first permanent magnet 1012 is positioned between a first coil 1014 and a second coil 1016, where the first permanent magnet 1012, the first coil 1014, and the second coil 1016 surround the second magnetic pole-piece 1004. In addition, a second permanent magnet 1018 is positioned between a third coil 1020 and a fourth coil 1022, where the second permanent magnet 1018, the third coil 1020, and the fourth coil 1022 surround the fourth magnetic pole-piece 1008. Of course, other configurations of stacked magnetic pole-pieces may be provided, and are intended to be covered by the present invention.

A movable portion 1030 of the micropositioner 1000 contains a first end cap 1032 and a second end cap 1034 connected to each other via at least one non-magnetic strut 1036. A first rubber bearing sheet 1038 separates the fifth magnetic pole-piece 1010 from the non-magnetic strut 1036, while a second rubber bearing sheet (not shown) separates the first magnetic pole-piece 1002 from the non-magnetic strut 1036. It should be noted that the micropositioner configuration of FIG. 65 provides multiple degrees of freedom.

A system may also be provided having multiple micropositioners. A system containing multiple micropositioners contains multiple degrees of freedom, where the degrees of freedom depend on the configuration of the micropositioners. FIG. 66 and FIG. 67 provide two examples of a system containing multiple micropositioners.

FIG. 66 is a schematic diagram illustrating a system 1100 having four micropositioners 1110, 1120, 1130, 1140. The cross configuration of the system 1100 and location of the micropositioners 1110, 1120, 1130, 1140, provides three degrees of freedom, namely, in the X-axis, the Y-axis, and rotation about the Z-axis.

FIG. 67 is a schematic diagram illustrating another system 1200 having multiple micropositioners. As is shown by FIG. 67, the system 1200 contains four micropositioners 1210, 1220, 1230, 1240 that are configured in a slot formation. The slot configuration of the system 1200 and location of the micropositioners 1210, 1220, 1230, 1240, provides three degrees of freedom, namely, in the Z-axis, rotation about the Y-axis, and rotation about the X-axis.

While the abovementioned provides two examples of systems having multiple micropositioner, resulting in multiple degrees of freedom, one having ordinary skill in the art would appreciate that there are many other configurations possible having multiple degrees of freedom. All such multiple micropositioner configurations are intended to be included within the present disclosure.

It should be emphasized that the above-described embodiments of the present invention are merely possible examples of implementations, merely set forth for a clear understanding of the principles of the invention. Many variations and modifications may be made to the above-described embodiments of the invention without departing substantially from the spirit and principles of the invention. All such modifications and variations are intended to be included herein within the scope of this disclosure and the present invention and protected by the following claims. 

1. A micropositioner, comprising: an outer magnetic pole-piece; an inner magnetic pole-piece at least partially located within said outer magnetic pole piece; at least one permanent magnet located between said inner magnetic pole piece and said outer magnetic pole-piece; at least one coil located between said inner magnetic pole-piece and said outer magnetic pole-piece, wherein said at least one coil is capable of directing magnetic flux between said inner magnetic pole-piece and said outer magnetic pole-piece; and a movable shell, movably connected to said outer magnetic pole-piece.
 2. The micropositioner of claim 1, wherein said movable shell is movably connected to said outer magnetic pole-piece via at least one rubber bearing.
 3. The micropositioner of claim 2, further comprising a first coil and a second coil, wherein said permanent magnet is located between said first coil and said second coil.
 4. The micropositioner of claim 2, wherein said micropositioner has two degrees of freedom.
 5. The micropositioner of claim 1, wherein said movable shell further comprises, a first end cap; a second end cap; and at least one non-magnetic strut connecting said first end cap to said second end cap.
 6. The micropositioner of claim 5, wherein said at least one non-magnetic strut is located within said inner magnetic pole-piece.
 7. The micropositioner of claim 6, where a top portion of said non-magnetic strut is connected to a bottom central portion of said first end cap, and wherein a bottom portion of said non-magnetic strut is connected to a top central portion of said second end cap.
 8. The micropositioner of claim 7, wherein a side portion of said non-magnetic strut is separated from said inner magnetic pole-piece by at least one stack of o-rings.
 9. The micropositioner of claim 5, wherein said movable shell is movably connected to said outer magnetic pole-piece via at least one rubber bearing, and wherein said at least one non-magnetic strut is connected to said at least one rubber bearing.
 10. The micropositioner of claim 1, wherein said movable shell is movably connected to said outer magnetic pole-piece via at least one metal flexure.
 11. The micropositioner of claim 1, wherein said at least one permanent magnet is located between a first coil and a second coil.
 12. The micropositioner of claim 1, further comprising a position sensor capable of determining a distance between said position sensor and a portion of said movable shell.
 13. The micropositioner of claim 12, wherein said movable shell further comprises, a first end cap; a second end cap; and at least one non-magnetic strut connecting said first end cap to said second end cap, and wherein said position sensor is capable of determining a distance between said position sensor and said first end cap.
 14. The micropositioner of claim 12, further comprising a second position sensor, wherein said second position sensor is capable of determining a distance between said second position sensor and said second end cap.
 15. The micropositioner of claim 12, wherein said position sensor is selected from the group consisting of a capacitive position sensor, a laser interferometer, a glass scale encoder, and an eddy variable reluctance position sensor.
 16. The micropositioner of claim 1, further comprising a securing device connected to said outer magnetic pole piece for allowing said micropositioner to be secured to a surface, while still allowing said movable shell to move.
 17. The micropositioner of claim 1, wherein more than one of said micropositioner is provided within a system, thereby providing said system with more than two degrees of freedom.
 18. The micropositioner of claim 1, further comprising multiple inner magnetic pole-pieces.
 19. A micropositioner, comprising: an outer magnetic pole-piece; an inner magnetic pole-piece at least partially located within said outer magnetic pole piece; at least one permanent magnet located between said inner magnetic pole piece and said outer magnetic pole-piece; at least one coil located between said inner magnetic pole-piece and said outer magnetic pole-piece, wherein said at least one coil is capable of directing magnetic flux between said inner magnetic pole-piece and said outer magnetic pole-piece; and a bearing located between said permanent magnet and said inner magnetic pole piece.
 20. A micropositioner, comprising: a series of magnetic pole-pieces; a series of permanent magnets, wherein each permanent magnet is located between a first magnetic pole-piece and a second magnetic pole-piece; a series of first coils and a series of second coils, wherein each permanent magnet is located between one of said first coils and one of said second coils; and a movable shell, movably connected to at least one of said magnetic pole pieces.
 21. The micropositioner of claim 20, wherein said movable shell contains more than one degree of freedom.
 22. The micropositioner of claim 20, wherein said movable shell is movably connected to said at least one of said magnetic pole pieces via at least one rubber bearing.
 23. The micropositioner of claim 20, wherein said movable shell further comprises, a first end cap; a second end cap; and at least one non-magnetic strut connecting said first end cap to said second end cap.
 24. The micropositioner of claim 20, wherein said movable shell is movably connected to said at least one of said magnetic pole pieces via at least one metal flexure.
 25. The micropositioner of claim 20, further comprising a position sensor capable of determining a distance between said position sensor and a portion of said movable shell.
 26. The micropositioner of claim 20, wherein said position sensor is selected from the group consisting of a capacitive position sensor, a laser interferometer, a glass scale encoder, and an eddy variable reluctance position sensor. 